Surface Profilometer
Tencor P16+ Stylus Contact Profilometer
Metrology characterization of large and small samples
Key Functionalities
•Surface roughness, step-height, crater-depth measurements
•Large dynamic z-range (up to 1mm)
•20 site automated measurement capability
Important Configuration Parameters
•Stylus profilometer
•Large sample platten for mounting of large samples, or many small samples
•Extended range sensor head for characterization of surface features from nm to mm scale.
•Adjustable force settings to allow analysis of hard and soft materials
•Interfaced to PC with analysis software
•Digital camera for image capture, sample navigation
