OCCAM offers a comprehensive array of surface analytical equipment. Infrastructure includes ultrahigh vacuum electron and ion spectroscopy/spectrometry tools, as well as a number of scanning probe instruments.
Electron Spectroscopy
- ThermoFisher KAlpha Xray Photoelectron Spectrometer (XPS)
- automated, high-throughput XPS
- ThermoFisher ThetaProbe Xray Photoelectron Spectrometer (ARXPS)
- parallel angle-resolved XPS system
- ThermoFisher EscaLab 250 Xi Xray Photoelectron Spectrometer (XPS)
- parallel imaging XPS, multi-technique capabilities (ultraviolet photoelectron spectroscopy, Auger spectroscopy, reflected electron energy loss spectroscopy), gas-cluster ion source, integrated high-purity glovebox
- Physical Electronics 710 Scanning Auger Nanoprobe (Auger)
- high lateral and depth resolution elemental and chemical state characterization, including imaging
Ion Spectrometry/Spectroscopy
- ION-TOF GmbH. ToF-SIMS 5 Time of Flight Secondary Ion Mass Spectrometer (ToF-SIMS)
- high spectral and spatial resolution ion imaging, gas-cluster ion source, integrated high-purity glovebox
- ION-TOF GmbH. QTac Low Energy Ion Scattering Spectrometer (LEIS)
- monolayer surface sensitivity, integrated sample perturbation and treatment, integrated high-purity glovebox, gas-cluster ion source
Scanning Probe
- Bruker (Anasys) nanoIR2 Photothermal Infrared atomic Force Microscope (PTIR AFM)
- standard atomic force microscope modes, small spot/high resolution infrared spectroscopy and imaging
- KLA-Tencor P-16+ Stylus Surface Profilometer
- contact stylus profilometer for e.g. step-height, surface roughness measurements, 2D and 3D modes