Low Energy Ion Scattering Spectrometer

(ION-TOF QTac LEIS)

ION-TOF GmbH. QTac low energy ion scattering spectrometer.

Absolute top atomic layer quantitative elemental characterization.

Key Functionalities

  • true monolayer characterization, providing quantitative elemental information from the absolute top atomic layer and next-nearest layers
  • sensitivity to elements Li and heavier
  • straightforward quantification
  • high depth resolution profiling
  • scattered ion imaging

Key Configuration Parameters

  • low energy rare gas (He, Ne, Ar) primary ion source
  • sample preparation and modification chamber equipped with sample heating, atomic hydrogen/oxygen system, and gas dosing
  • sample heating during characterization
  • dual-stage sample entry system
Sample preparation chamber of QTac low energy ion scattering (LEIS) system.

For more information, contact Peter Brodersen.

Open Centre for the Characterisation of Advanced Materials