(PHI 710 Scanning Auger NanoProbe)
High lateral spatial resolution and high depth resolution quantitative elemental and chemical state information.
Key Functionalities
- quantitative elemental and chemical state characterization
- variable spot-size and multiple-area electron spectroscopy
- high spatial resolution secondary electron imaging
- high spatial resolution surface-specific elemental and chemical state mapping
- high resolution depth profiling (variable spot size, including point)
Key Configuration Parameters
- cylindrical mirror analyzer
- co-axially mounted Schottky field emission electron source (1-25 keV)
- motorized 5-axis precision specimen stage
- 5 kV floating column Ar ion source (surface cleaning, depth profiling, charge neutralization)
- 60 mm specimen load-lock and introduction
For more information, contact Peter Brodersen.