- Parallel Imaging XPS, < 3 mm spatial resolution
- Monochromated Al Ka & non-monochromated dual anode (Mg/Ag) X-ray sources
- Inverse and UV photoelectron spectroscopy
- Dual mode Ar mono/cluster ion source – effective profiling/cleaning of both soft and hard materials
- Effective charge compensation
- Imaging Auger (95 nm resolution)
- Residual Gas Analysis (Hiden)
- Glove box + preparation chamber
- Heating/cooling
