Electron Spectroscopy

• ThermoFisher Scientific K-Alpha
  • Automated, high throughput XPS
• ThermoFisher Scientific ThetaProbe
  • Parallel Angle XPS
  • Imaging Auger
• Parallel Imaging XPS
  • UV photoelectron spectroscopy
  • Ar cluster ion gun
  • Glovebox
• Scanning Auger Microprobe (coming)
  • 8 -10 nm spatial resolution

Scanning Probe Microscopy

• Anasys nanoIR
  • Combined AFM/IR
• KLA Tencor P16A Stylus Profiliometer

Sample Manipulation

• Leica EM UC6/FC Cryo-Ultramicrotome
• Leica EM TXP Target Sectioning System
• Vacuum/Cryo “Suitcase”
  • Virtual connection between chambers

Ion Spectroscopy

• IONTOF TOFSIMS 5
  • Ar cluster ion source
• ION-TOF QTac Low Energy Ion Scattering
  • True monolayer sensitivity

Electron Microscopy

• Hitachi CFE-TEM HF3300
  • Environmental TEM
  • Nano diffraction
  • Spatially resolved EELS
  • High pressure SE detector
  • In situ TEM/STEM/SEM
• Hitachi VP-SEM SU3500
  • Variable pressure SEM
  • EDX
• Hitachi UHR-SEM SU8230
  • Ultra-high resolution SEM
  • SE/BSE/STEM
• Hitachi UHR-SEM Schottky SU7000
  • EDX
  • EBSD
• Hitachi HT-7700 TEM/STEM

Sample Preparation

• Hitachi Dual-beam FIB-SEM NB5000
  • Focused Ion (Ga) and e-beam system
  • TEM/STEM/SEM sample preparation
  • Ease of transfer to TEM
• Hitachi Ion milling system IM4000
  • “Poor Man’s FIB”
• Polishing equipment