Low Energy Ion Scattering Spectrometer
Qtac (ION-TOF, GmbH.)
Absolute top atomic layer quantitative elemental characterization
Qtac Low Energy Ion Scattering Spectrometer (ION-TOF GmbH.)
Key Functionalities
•True monolayer characterization, providing quantitative elemental information from the absolute top atomic layer and next-nearest layers
•Sensitivity to elements Li and heavier
•Straightforward quantification
•High depth resolution profiling
•Scattered ion imaging
Key Configuration Parameters
•Low energy, rare gas (He, Ne, Ar) primary in source
•Sample preparation and modification chamber equipped with sample heating, atomic hydrogen/oxygen system, gas dosing, ion sputtering
•Sample heating (during characterization)
•Dual stage sample entry system
