High-Throughput Xray Photoelectron Spectrometer
Kalpha XPS (ThermoFisher Scientific)
Surface sensitive, quantitative, elemental and chemical state characterization
Kalpha (ThermoFisher Scientific) XPS system
Key Functionalities
•High sensitivity, high spectral resolution quantitative surface spectroscopy providing elemental and chemical state information
•Spatially-resolved, surface-specific elemental and chemical state mapping
•High resolution depth profiling
•Large capacity, flexible specimen mounting
•Highly-integrated and intuitive control system
Key Configuration Parameters
•Monochromated Al K-alpha X-ray, micro-focused variable spot-size of 30-400um
•Charge compensation
•Argon ion source for profiling/cleaning of specimen (with computational Zalar rotation possible)
•Pre-tilt sample wedges (20o and 30o) for angle-resolved characterization
•60 mm x 60 mm sample platten with highly-flexible specimen mounting options
•Fully digital control, automated operation, integrated data acquisition and analysis software
