Qtac Low Energy Ion Scattering Spectrometer (ION-TOF GmbH.)
Scanning Auger Nanoprobe
PHI 710 Scanning Auger NanoProbe (Physical Electronics, Inc.)
High lateral resolution and high depth resolution quantitative elemental and chemical state information
PHI 710 Scanning Auger NanoProbe
Key Functionalities
•Quantitative elemental and chemical state characterization
•Variable spot-size and multiple-area spectroscopy
•High resolution electron imaging
•High spatial resolution surface-specific elemental and chemical state mapping
•High resolution depth profiling
Key Configuration Parameters
•Cylindrical mirror analyzer
•Co-axially mounted Schottky field emission electron source (1-25 keV)
•Motorized precision 5-axis specimen stage
•5 kV floating column Ar ion source (for surface cleaning, depth profiling, charge neutralization)
•60 mm specimen load-lock and introduction
•Controlled atmosphere sample transfer
