Parallel Angle Xray Photoelectron Spectrometer
ThetaProbe (ThermoFisher Scientific)
Surface sensitive, quantitative, elemental and chemical state characterization, non-destructive depth profiling
ThetaProbe XPS (ThermoFisher Scientific) parallel angle XPS system with integrated preparation chamber
Key Functionalities
• High resolution, quantitative surface spectroscopy providing elemental and chemical state information
• Spatially-resolved, surface-specific elemental and chemical state mapping
• Non-destructive depth profiling via parallel angle data acquisition
• High resolution sputter depth profiling
• Advanced sample handling capabilities for transfer/characterization of samples
Key Configuration Parameters
• 2D multi-channel detector capable of both parallel energy and angular acquisition (60o range)
• Monochromated Al K-alpha xray source, micro-focused variable spot-size of 15-400um
• Argon ion source for profiling/cleaning of specimen (Zalar rotation possible)
• Charge compensation
• Integrated sample preparation and modification chamber equipped with specimen parking, sample heating, gas-dosing, additional ports for bolt-on systems
• Sample heating/cooling (during characterization)
• Advanced specimen transfer system (in-vacuo, controlled-atmosphere, and cryo transfer)
