Scanning Auger Microprobe

(Coming, vendor to be determined)

In a SAM, the sample is bombarded by an electron beam (1-10 keV energy) which can eject core electrons from level X. A rearrangement occurs, whereby an electron from level Y fills the hole while the excess energy is taken by a third electron from level Z. The energy of this electron is EA (XYZ) and it is known as the Auger electron. Spatial resolutions < 12 nm are now easily achievable.

Ontario Centre for the Characterisation of Advanced Materials