Surface Characterization Infrastructure
OCCAM offers a comprehensive array of surface analytical equipment. Infrastructure includes ultrahigh vacuum electron and ion spectroscopy/spectrometry instruments, as well as scanning probe tools.
Electron Spectroscopy
•ThetaProbe (ThermoFisher Scientific) Xray Photoelectron Spectrometer (XPS)
oparallel angle-resolved XPS system
•Kalpha (ThermoFisher Scientific) Xray Photoelectron Spectrometer (XPS)
oautomated, high-throughput XPS
•EscaLab 250 Xi (ThermoFisher Scientific) Xray Photoelectron Spectrometer (XPS)
oparallel imaging XPS, multi-technique capabilities (ultraviolet photoelectron spectroscopy, Auger spectroscopy, reflected electron energy loss spectroscopy), gas-cluster ion source, integrated high-purity glovebox
•710 Scanning Auger NanoProbe (Physical Electronics, Inc.) Auger Electron Spectrometer (AES)
ohigh lateral and depth resolution elemental and chemical state characterization, including imaging
Ion Spectrometry/Spectroscopy
•ToF-SIMS V (ION-TOF GmbH.) Time of Flight Secondary Ion Mass Spectrometer (ToF-SIMS)
•High spectral and spatial resolution ion imaging, gas-cluster ion source, integrated high-purity glovebox
•Qtac (ION-TOF GmbH) Low Energy Ion Scattering Spectrometer (LEIS)
•Monolayer surface sensitivity, integrated sample perturbation and treatment, integrated high-purity glovebox, gas-cluster ion source
Scanning Probe
•NanoIR2 (Bruker) Photothermal Infrared Atomic Force Microscope (PTIR-AFM)
•Standard atomic force microscope modes, small spot/high resolution infrared spectroscopy and imaging
•P-16+ (Tencor) Stylus Surface Profilometer
•Contact stylus profilometer for e.g. step-height, surface roughness measurements, 2D and 3D modes