Low Energy Ion Scattering (LEIS)

(Vendor to be determined)

Surface is bombarded by low energy (1-5 keV) rare gas (He, Ne, or Ar) ions. A fraction will be inelastically scattered and will lose an amount of kinetic energy dependent on the relative masses of the ion and struck atom. Knowing the impact parameters allows quantification of the target atom.

  • True monolayer sensitivity
  • Virtually non-destructive
  • Straight-forward quantification
  • All elements Li and up
  • 0.01-1% of monolayer detection limit (dependent on atomic wt.)

“One-stop shopping at the frontiers of material characterisation”

Ontario Centre for the Characterisation of Advanced Materials